成都n型碳化硅衬底_鄂尔多斯碳化硅_鄂尔多斯碳化硅晶体_豪麦瑞供_苏州豪麦瑞材料科技有限公司专业从事氧化铝球,氧化锆球,陶瓷精加工,纺织陶瓷抛光加工业务.联系电话:18962527682 网址:www.homraymaterial.cn
碳化硅半导体是新一代宽禁带半导体,它具有热导率高,与GaN晶格失配小等优势,非常适合用作发光二极管,大功率电力电子材料。
采用碳化硅作衬底的LED器件亮度更高、能耗更低、寿命更长、单位芯片面积更小,且在大功率LED方面具有非常大的优势。此外,碳化硅除了用作LED衬底,它还可以制造高耐压、大功率电力电子器件如肖特基二极管(SBD/JBS)、绝缘栅双极型晶体管(IGBT),晶闸管(GTO)、金属氧化物半导体场效应晶体管(MOSFET)等,用于智能电网、太阳能并网、电动汽车等行业。
从整体上看,碳化硅半导体完整产业链包括:碳化硅原料-晶锭-衬底-外延-芯片-器件-模块。
我们公司进口碳化硅晶圆,为我们的客户提供所需的材料,让客户在这样行业里促进技术的快速扩展。
产品介绍:
n-type SiC Substrate
PRODUCT DESCRIPTIONS
The Materials Business Unit produces a wide assortment of n-type conductive SiC products ranging in wafer diameters up to 150mm. This material is manufactured upon a high-volume platform process that provides our customers the highest degree of material quality, supply assurance and economies of scale.
Part Number |
Description |
W4NRF0X-0200
|
4H-SiC, n-type, Research Grade, 100mm, On-Axis, 0.013-2.0 ohm-cm, Standard MPD, 500um Thick, DoubleSided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NRF4C-U200
|
4H-SiC, n-type, Research Grade, 100mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, 350um Thick, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NPF4C-U200
|
4H-SiC, n-type, Production Grade, 100mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, 350um Thick, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NRF4C-B200 |
4H-SiC, n-type, Research Grade, 100mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, Low BPD ≤1500/cm2, 350um Thick, Double Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NPF4C-B200 |
4H-SiC, n-type, Production Grade, 100mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, Low BPD ≤1500/cm2, 350um Thick, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NRG4C-C1-V200 |
4H-SiC, n-type, Research Grade, 150mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Very Low MPD ≤5/cm2, 350um Thick w/ 47.5mm Flat, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NPG4C-C1-V200 |
4H-SiC, n-type, Production Grade, 150mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Very Low MPD ≤5/cm2, 350um Thick w/ 47.5mm Flat, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NRG4C-C1-U200 |
4H-SiC, n-type, Research Grade, 150mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, 350um Thick w/ 47.5mm Flat, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
W4NPG4C-C1-U200 |
4H-SiC, n-type, Production Grade, 150mm, 4° Off-Axis, 0.015-0.028 ohm-cm, Ultra Low MPD ≤1/cm2, 350um Thick w/ 47.5mm Flat, Double-Sided Polish Si Face CMP Epi Ready, Bare Substrate |
*C-faced polished wafers and 150mm LBPD substrates available upon request, lead times dependent on volume and requirements
FLAT LENGTH |
Linear dimension of the flat measured with ANSI-certified digital calipers on a sample of one wafer per ingot |
|
|||
PRIMARY FLAT |
The flat of the longest length on the wafer, oriented such that the chord is parallel with a specified low-index crystal plane. |
||||
PRIMARY FLAT ORIENTATION |
The primary flat is the {1010} plane with the flat face parallel to the <1120> direction. Measured with Laue back reflection technique. |
||||
SECONDARY FLAT |
A flat of shorter length than the primary flat, whose position with respect to the primary flat identifies the face of the wafer. Not applicable to 150mm wafers. |
||||
SECONDARY FLAT ORIENTATION |
The secondary flat is the {11-20} plane with the flat face parallel to the <1010> direction. Measured with Laue back reflection technique. |
|
|||
MARKING |
For silicon-face polished material, the carbon face of each individual wafer is laser-marked with OCR-compatible font, similar to definitions and characteristics in SEMI M12. For carbonface-polished material, the silicon face of each individual wafer is laser-marked. |
PRODUCT SPECIFICATIONS
100mm Diameter n-type Substrates |
|
Diameter |
100.0 mm +0.0/-0.5 mm |
Thickness |
|
On-axis |
500 μm ± 25 μm |
Off-axis |
350.0 μm ± 25.0 μm |
Dopant |
Nitrogen |
Primary flat length |
32.5 mm ± 2.0 mm |
Secondary flat length |
18.0 mm ± 2.0 mm |
Surface orientation |
|
On-axis |
{0001} ± 0.25˚ |
Off-axis |
4.0˚ toward <1120> ± 0.5˚ |
Surface finish |
Back face optical polish, epi-face CMP |
Orthogonal misorientation |
± 5.0˚ |
Primary flat orientation |
<1120> ± 5.0˚ |
Secondary flat orientation |
90.0˚ CW from primary ± 5.0˚, silicon face up |
TTV |
≤15 microns, full substrate |
Warp |
≤45 microns, full substrate |
LTV (average, 1 cm2 site) |
≤4 microns, full substrate |
Edge chips by diffuse lighting |
|
Production-grade |
none permitted ≥0.5mm width and depth |
Research-grade |
qty. 2 ≥1.0 mm width and depth |
150mm Diameter n-type Substrates |
|
Diameter |
150.0 mm ± 0.25 mm |
Thickness |
|
C1 specification |
350 μm ± 25 μm |
Dopant |
Nitrogen |
Primary flat length |
47.5 mm ± 1.5 mm |
Secondary flat length |
None |
Surface orientation |
4.0˚ toward <11-20> ± 0.5˚ |
Surface finish |
Back face optical polish, epi-face CMP |
Orthogonal misorientation |
± 5.0˚ |
Primary flat orientation |
<11-20> ± 5˚ |
Secondary flat orientation |
N/A |
TTV |
≤10 μm |
Warp |
|
Production-grade |
≤40 μm |
Research-grade |
≤60 μm |
LTV (average, 1 cm2 site) |
|
Production-grade |
≤2 μm |
Research-grade |
≤4 μm |
Edge chips by diffuse lighting |
|
Production-grade |
none permitted ≥0.5mm width and depth |
Research-grade |
qty. 2 ≥1.0 mm width and depth |
苏州豪麦瑞材料科技有限公司简介:
苏州豪麦瑞材料科技有限公司是一家专业从事氧化铝、氧化锆产品、开发 制造、销售于一体的企业,企业有国内前列的工艺,专业的技术人员,先进的生产设备和检测手段。我公司生产的产品主要有:工业用各类氧化铝粉包括(蓝宝石长晶用粉,抛光用粉,抛光液用氧化铝粉,片状氧化铝粉……),研磨用氧化铝球,研磨用氧化锆球,氧化铝陶瓷件,精密氧化铝陶瓷,专业陶瓷精加工服务,纺织陶瓷抛光精加工服务。
我公司产品齐全,被大范围用于研磨、半导体、化工、抛光、制造、纺织等行业。由于我们的产品性能优良,久经耐用,深受广大用户好评。我们将优质的产品与服务奉献客户, 尽我们比较大的努力达到客户的满意。我们希望建立长期的友好合作关系,欢迎广大国内外新老客户来电咨询及来厂考察洽谈!
苏州豪麦瑞材料科技有限公司联系方式:
王经理:18962527682
孙经理:18626214311
联系电话:0512-65030678
网址:www.homraymaterial.cn
地址:苏州市工业园区唯华路3号君地商务广场5栋602室