技术指标:Accelerating voltage? 25/50 kV Minimum line width? 10 nm ?50 kV?th? Overlay Accuracy? 40 nm Field stitching Accuracy: 40 nm Exposure range? ??75 mm Scan speed?12 MHz to 250 Hz
仪器用途:???????阙??对电????????图?
收费标准:800?/h
机组负责人:张嫔 0512-62872625 pzhang2008@sinano.ac.cn